Fabrication of high-aspect-ratio arrayed structures using Si electrochemical etching
نویسندگان
چکیده
منابع مشابه
High Aspect Ratio Si Etching in STS2
Deep reactive ion etching (DRIE) is one of the most important etching techniques because it is independent of crystal orientation and does not require any wet process. DRIE can be applied for many applications. For examples, this technique can be used to fabricate MEMS devices (e.g. accelerometers, scanners, etc.), microfluidic devices, electrical through wafer interconnects, and so on. In many...
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Using a graphite crucible as the counter-electrode, platinum microprobes with an aspect ratio of 30 and a tip apex radius less than 100 nm were fabricated by an electrochemical discharge etching process. The "neck-in" structure on the platinum wire induced by the electrical discharge at the liquid-air interface plays a key role in the probe shape and the voltage of the following pure electroche...
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This communication describes the fabrication of gold structures (for example, rings) with wall thickness of 40 nm, and with high aspect ratios up to 25. This technique combines thin-film deposition of metal on a topographically patterned epoxy substrate, with nanometer-scale sectioning using a microtome in a plane parallel to the patterned substrate. The dimensions of the metal structures are d...
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An excimer laser micromachining system is developed to study the process in fabricating high-aspect-ratio microstructures. Specifically, the study experimentally examines process efficiency and the impact of changing major laser operating parameters on the resulting microstructural shapes and morphology. The materials considered in the study include glass, silicon, and aluminum. The ablation or...
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We have previously demonstrated that it is possible to fabricate densely-packed high aspect ratio structures in SU-8 by means of a top-plate support member which stiffens the overall structure and prevents pattern collapse. In this work we have computed the tensile stresses induced in the top-plate structures due to the capillary forces that arise between the columns due to the surface tension ...
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ژورنال
عنوان ژورنال: Science and Technology of Advanced Materials
سال: 2006
ISSN: 1468-6996,1878-5514
DOI: 10.1016/j.stam.2006.04.004